Low and High Temperature Performance

  • Thermal Evaporation System
  • UHV Evaporation System
  • Effusion Cell Epitaxy System
  • Molecular Beam Epitaxy System
  • Organic Molecular Beam Deposition System
해당개발제품

We manufacture a wide range of effusion cells that are specifically designed for operation in HV and UHV environments. These include single and dual zone filament models in sizes ranging from 5 to 60cc (120 and 200cc for organic products deposition, in particular). All effusion cells require a crucible, cable, temperature controller and a heater power supply to be fully operable. Integrated shutter and cooling module are optional parts ALPHAPLUS supplies mass production E-cells to production lines of world’s OLED display manufacturers. We continue to develop new cells besides Point, Linear, Sideward and Downward and strive to mass produce high quality products based on our excellent technology and quality control.

SPECIFICATIONS (CELL)

MODEL AEC-500-Series AEC-1300-Series AEC-1600-Series
Filament Construction Tantalum wire with PBN supports
Filament Type Modified single filament or Dual zone filament
Thermal Reflector Tantalum sheets
Max. Heating
Temperature
500℃ 1300℃ 1600℃
Thermocouple Type-K Type-C
Base Flange Type CF 4.5" or 6”
Crucible Graphite/Quartz,
Alumina, PBN
Alumina, PBN PBN
Crucible Capacity 2,5,6,10,20,60,
125,250,500,580
2,5,6,10,20,30,40,
60,125,250,500,580
2,5,6,10,20,60,
125,150,250,500,580
Electronical AEC-500-Series AEC-1300-Series AEC-1600-Series
ECC-DC1520
(15 A, 20V)
O    
ECC-DC2020
(20 A, 20V)
O    
ECC-DC2040
(20 A, 40V)
O O  
ECC-DC2080
(20 A, 80 V)
  O O
ECC-DC20100
(20 A, 100 V)
  O O
ECC-DC20120
(20 A, 120 V)
  O O
ECC-DC20150
(20 A, 150 V)
  O  
ECC-DC24100
(24 A, 100 V)
  O  
Options AEC-500-Series AEC-1300-Series AEC-1600-Series
UHV Shutter O O(Except for some)
Cooling Shroud Include(Except for some)
RS232C O
Programmable
MODEL Filament Construction Filament Type
AEC-500-Series Tantalum wire with PBN supports Modified single filament or Dual zone filament
AEC-1300-Series
AEC-1600-Series
MODEL Thermal Reflector Max. Heating
Temperature
AEC-500-Series Tantalum sheets 500℃
AEC-1300-Series 1300℃
AEC-1600-Series 1600℃
MODEL Thermocouple Base Flange Type
AEC-500-Series Type-K CF 4.5" or 6”
AEC-1300-Series Type-C
AEC-1600-Series
MODEL Crucible Crucible Capacity
AEC-500-Series Graphite/Quartz, Alumina, PBN 2,5,6,10,20,60,
125,250,500,580
AEC-1300-Series Alumina, PBN 2,5,6,10,20,30,40,
60,125,250,500,580
AEC-1600-Series PBN 2,5,6,10,20,60,
125,150,250,500,580
Electronical ECC-DC1520
(15 A, 20V)
ECC-DC2020
(20 A, 20V)
AEC-500-Series O O
AEC-1300-Series    
AEC-1600-Series    
Electronical ECC-DC2040
(20 A, 40V)
ECC-DC2080
(20 A, 80 V)
AEC-500-Series O  
AEC-1300-Series O O
AEC-1600-Series   O
Electronical ECC-DC20100
(20 A, 100 V)
ECC-DC20120
(20 A, 120V)
AEC-500-Series    
AEC-1300-Series O O
AEC-1600-Series O O
Electronical ECC-DC20150
(20 A, 150 V)
ECC-DC24100
(24 A, 100 V)
AEC-500-Series    
AEC-1300-Series O O
AEC-1600-Series    
Options UHV Shutter Cooling Shroud
AEC-500-Series O Include(Except for some)
AEC-1300-Series O(Except for some)
AEC-1600-Series
Options RS232C Programmable
AEC-500-Series O
AEC-1300-Series
AEC-1600-Series

SOURCE SELECTION GUIDE

Special Type (Linear Source)

Linear Source
  • As key-components & controller used in manufacturing thin film solar cell, OLED, displays, semiconductors, etc., it is a country’s premier evaporator which can evaporate downward (will be the first commercialization in Korea)
  • Special Source - Linear Source : Box-type, Tube-type - Sideward, Downward Source - Plasma Cell

Special Type

Application

Solar Power Center
Thermal Evaporation System
Molecular Beam Epitaxy System

개인정보처리방침

이메일주소무단수집거부

이메일주소 무단수집거부합니다.

본 웹사이트에 게시된 이메일 주소가 전자우편 수집 프로그램이나 그 밖의 기술적 장치를 이용하여 무단으로 수집되는 것을 거부하며,
이를 위반시 정보통신망법에 의해 형사 처벌됨을 유념하시기 바랍니다.

사이트맵

기업정보
CEO인사말
경영이념
회사연혁
사업소개
조직도
오시는길
인사제도
제품소개
Vacuum System
Vacuum Components
개발제품
홍보센터
보도자료
자료실
연구소
특허 및 인증현황
고객지원
이벤트참여
고객상담&견적문의