E-Beam Evaporation System

  • Optical Multi LayerE - Beam Evaporation System
  • High VacuumE - Beam Evaporation System
  • Ultra-high Vacuum (UHV)E - Beam Evaporation System
  • Ion BeamAssisted Evaporation System
  • Ion PlatingSystem
  • Cluster ToolE - Beam Evaporation System
  • In-lineE - Beam Evaporation System - Depends on - Substrate quantity and Area - Single or Multi Layer films
해당개발제품

E-Beam Evaporation belongs to a larger category of Physical Vapor Deposition (PVD). Deposition processes are used to release a material from a source and to transfer that material to a substrate forming a thin film or coating. PVD processes are commonly used for the deposition of metals, because they can be performed at lower process risk and cheaper in regards to materials cost than Chemical Vapor Deposition (CVD).

SOFTWARE

  • Safety locks for devices with operator
  • Displayed Data by Manual Deposition Mode
  • Control Panel on PC with Touch Screen

SPECIFICATIONS(SYSTEM)

MODEL EB 500s EB 700s EB 900s EB 1200s EB 1500s
Vacuum Chamber ID512 x 838H ID712 x 918H ID950 x 1,300H ID1,200 x 1,400H ID1,500 x 1,500H
Substrate Holder OD 400 mm OD 605 mm OD 850 mm OD 1,100 mm OD 1,400 mm
2 inch Sub. 21 sheets 47 sheets 93 sheets 149 sheets 246 sheets
4 inch Sub. 6 sheets 18 sheets 36 sheets 59 sheets 90 sheets
8 inch Sub.   4 sheets 7 sheets 14 sheets 22 sheets
370 x 470mm         4 sheets
Purpose Production
R & D
Production
R & D
Production Production Production
Lift-off process
General
Lift-off process
General
Optical multi layer
General
Remarks Cluster Tool or In-line E-Beam Evaporation System (Order made after proposal to and discussion with customer)
MODEL Vacuum Chamber Substrate Holder
EB 500s ID512 x 838H OD 400 mm
EB 700s ID712 x 918H OD 605 mm
EB 900s ID950 x 1,300H OD 850 mm
EB 1200s ID1,200 x 1,400H OD 1,100 mm
EB 1500s ID1,500 x 1,500H OD 1,400 mm
MODEL 2 inch Sub. 4 inch Sub.
EB 500s 21 sheets 6 sheets
EB 700s 47 sheets 18 sheets
EB 900s 93 sheets 36 sheets
EB 1200s 149 sheets 59 sheets
EB 1500s 246 sheets 90 sheets
MODEL 8 inch Sub. 370 x 470mm
EB 500s    
EB 700s 4 sheets  
EB 900s 7 sheets  
EB 1200s 14 sheets  
EB 1500s 22 sheets 4 sheets
MODEL Purpose
EB 500s Production
R & D
Lift-off process
General
EB 700s
EB 900s Production Optical multi layer
General
EB 1200s
EB 1500s
MODEL Remarks
EB 500s Cluster Tool or In-line E-Beam Evaporation System (Order made after proposal to and discussion with customer)
EB 700s
EB 900s
EB 1200s
EB 1500s

Source(E-beam source)

Source(Ion source)

개인정보처리방침

이메일주소무단수집거부

이메일주소 무단수집거부합니다.

본 웹사이트에 게시된 이메일 주소가 전자우편 수집 프로그램이나 그 밖의 기술적 장치를 이용하여 무단으로 수집되는 것을 거부하며,
이를 위반시 정보통신망법에 의해 형사 처벌됨을 유념하시기 바랍니다.

사이트맵

기업정보
CEO인사말
경영이념
회사연혁
사업소개
조직도
오시는길
인사제도
제품소개
Vacuum System
Vacuum Components
개발제품
홍보센터
보도자료
자료실
연구소
특허 및 인증현황
고객지원
이벤트참여
고객상담&견적문의